SEMI Standards Followed by GEMBox
GEMBox-based host interfaces follow industry standards, defined by SEMI (Semiconductor Equipment and Materials International). SEMI is the global industry association serving the manufacturing supply chain for the micro- and nano-electronics industries. The SEMI International Standards Program brings together industry experts to exchange ideas and work towards developing globally accepted technical standards.
The SEMI standards used in GEMBox are listed below.
SEMI E30-0611 – GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment. The GEM standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Within certain boundaries, equipment suppliers may provide additional SECS-II functionality.
SEMI E5-0813 – SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.
SEMI E37-0413 – HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES
SEMI E37.1-0702 (Reapproved 0413) HIGH SPEED SECS MESSAGE SERVICES SINGLE-SESSION MODE (HSMS-SS)
HSMS provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another. HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient.
SEMI E4-0699 (Reapproved 0612) – SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-I)
The SECS-I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. This Standard includes the description of the physical connector, signal levels, data rate and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path.
Above SEMI Standards information is copyright © Semiconductor Equipment and Materials International. All rights reserved.